| 1. Identity statement | |
| Reference Type | Journal Article |
| Site | mtc-m16.sid.inpe.br |
| Holder Code | isadg {BR SPINPE} ibi 8JMKD3MGPCW/3DT298S |
| Identifier | 6qtX3pFwXQZGivnJVY/NeMgA |
| Repository | sid.inpe.br/mtc-m16@80/2006/11.22.17.49 |
| Last Update | 2006:11.22.17.50.01 (UTC) administrator |
| Metadata Repository | sid.inpe.br/mtc-m16@80/2006/11.22.17.49.05 |
| Metadata Last Update | 2018:06.05.01.17.06 (UTC) administrator |
| Secondary Key | INPE-14319-PRE/9407 |
| ISSN | 0021-8979 |
| Citation Key | TanUedDalOliRos:2006:MaFiEf |
| Title | Magnetic field effects on secondary electron emission during ion implantation in a nitrogen plasma  |
| Year | 2006 |
| Month | Aug |
| Access Date | 2024, May 19 |
| Secondary Type | PRE PI |
| Number of Files | 1 |
| Size | 107 KiB |
| 2. Context | |
| Author | 1 Tan, Ing Hwie 2 Ueda, Mário 3 Dallaqua, Renato Sérgio 4 Oliveira, Rogério de Moraes 5 Rossi, José Oswaldo |
| Resume Identifier | 1 8JMKD3MGP5W/3C9JHDC 2 8JMKD3MGP5W/3C9JHSB 3 8JMKD3MGP5W/3C9JJ5K 4 8JMKD3MGP5W/3C9JJ6L |
| Group | 1 LAP-INPE-MCT-BR 2 LAP-INPE-MCT-BR 3 LAP-INPE-MCT-BR 4 LAP-INPE-MCT-BR 5 LAP-INPE-MCT-BR |
| Affiliation | 1 Instituto Nacional de Pesquisas Espaciais (INPE) 2 Instituto Nacional de Pesquisas Espaciais (INPE) 3 Instituto Nacional de Pesquisas Espaciais (INPE) 4 Instituto Nacional de Pesquisas Espaciais (INPE) 5 Instituto Nacional de Pesquisas Espaciais (INPE) |
| Author e-Mail Address | 1 ingtan@plasma.inpe.br |
| Journal | Journal of Applied Physics |
| Volume | 100 |
| Number | 3 |
| History (UTC) | 2006-11-22 17:50:01 :: simone -> administrator :: 2008-06-10 22:44:03 :: administrator -> simone :: 2011-05-29 03:31:05 :: simone -> administrator :: 2018-06-05 01:17:06 :: administrator -> marciana :: 2006 |
| 3. Content and structure | |
| Is the master or a copy? | is the master |
| Content Stage | completed |
| Transferable | 1 |
| Content Type | External Contribution |
| Keywords | SURFACE MODIFICATION SUPPRESSION INSULATION |
| Abstract | In this work, the magnetic suppression of secondary electrons emitted during nitrogen plasma immersion ion implantation is investigated. Secondary electrons were measured by two Faraday cups with and without the presence of a magnetic field parallel to the target surface. One Faraday cup detects the electrons emerging perpendicularly to the target surface and magnetic field lines, while another cup detects electrons flowing along the field lines. Increase of magnetic field intensity resulted in a decrease of the amount of electrons detected by the perpendicular Faraday cup and in an increase of the electrons detected by the longitudinal one. This shows that secondary electrons were transversally confined by the magnetic field but diffused away from the target ends along the field lines. The secondary electron emission coefficient ( gamma ) was estimated and the results showed that partial suppression ( decrease in gamma ) was achieved when the plasma density was increased by an order of magnitude. We propose an explanation based on the formation of an electron layer ( virtual cathode ) near the target surface. Better suppression in denser plasmas would be expected because the virtual cathode would be maintained if the electron layer is formed faster than it is longitudinally lost. |
| Area | FISPLASMA |
| Arrangement | urlib.net > BDMCI > Fonds > Produção anterior à 2021 > LABAP > Magnetic field effects... |
| doc Directory Content | access |
| source Directory Content | there are no files |
| agreement Directory Content | there are no files |
| 4. Conditions of access and use | |
| data URL | http://urlib.net/ibi/6qtX3pFwXQZGivnJVY/NeMgA |
| zipped data URL | http://urlib.net/zip/6qtX3pFwXQZGivnJVY/NeMgA |
| Language | en |
| Target File | Magnetic field effects on secondary.pdf |
| User Group | administrator simone |
| Visibility | shown |
| Copy Holder | SID/SCD |
| Archiving Policy | allowpublisher allowfinaldraft |
| Read Permission | allow from all |
| 5. Allied materials | |
| Next Higher Units | 8JMKD3MGPCW/3ET2RFS |
| Citing Item List | sid.inpe.br/mtc-m21/2012/07.13.14.56.06 2 sid.inpe.br/mtc-m21/2012/07.13.14.50.16 2 sid.inpe.br/mtc-m21/2012/07.13.14.59.24 2 |
| Dissemination | WEBSCI; PORTALCAPES; COMPENDEX. |
| Host Collection | sid.inpe.br/banon/2003/08.15.17.40 |
| 6. Notes | |
| Empty Fields | alternatejournal archivist callnumber copyright creatorhistory descriptionlevel documentstage doi e-mailaddress format isbn label lineage mark mirrorrepository nextedition notes orcid pages parameterlist parentrepositories previousedition previouslowerunit progress project readergroup rightsholder schedulinginformation secondarydate secondarymark session shorttitle sponsor subject tertiarymark tertiarytype typeofwork url versiontype |
| 7. Description control | |
| e-Mail (login) | marciana |
| update | |